Silicides for VLSI Applications
- 1 Edición - 28 de marzo de 1983
- Última edición
- Autor: Shyam P. Murarka
- Idioma: Inglés
Most of the subject matter of this book has previously been available only in the form of research papers and review articles. I have not attempted to refer to all the published… Leer más
Descripción
Descripción
Most of the subject matter of this book has previously been available only in the form of research papers and review articles. I have not attempted to refer to all the published papers. The reader may find it advantageous to refer to the references listed.
De interès para
De interès para
It is written for practicing device engineers, materials scientists, and newcomers, including students of microelectronics technology.
Índice
Índice
Preface. Acknowledgements. Introduction. Properties. Thermodynamic Considerations. Formation. Oxidation. Integrated-Circuit Fabrication. Special Applications. References. Author Index. Subject Index.
Detalles del producto
Detalles del producto
- Edición: 1
- Última edición
- Publicado: 2 de diciembre de 2012
- Idioma: Inglés
Sobre el autor
Sobre el autor
SM
Shyam P. Murarka
Afiliaciones y experiencia
Bell Telephone LaboratoriesVer libro en ScienceDirect
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